| 摘要 |
<p>PURPOSE: A photo-mask and a pellicle attaching apparatus and an attaching method using the same are provided to suppress the distortion of patterns on the photo-mask and increase the holding time of an attached pellicle. CONSTITUTION: A photo-mask(200) is vertically supported by the front side of a first supporter(310). A pellicle is supported by the front side of a second supporter(320) which is parallelly arranged to the first supporter. A tube(330) is arranged to be in contact with the rear side of the first supporter and the second supporter. Fluid fills in the tube in order to apply the pressure of the fluid to the rear side of the first supporter and the rear side of the second supporter.</p> |
