发明名称 |
METHOD OF PREPARING DRY FILM PHOTORESIST |
摘要 |
<p>PURPOSE: A method for manufacturing a dry film photoresist is provided to perform a light exposure process while a support film is eliminated to prevent bad influences due to the support film, thereby increasing resolution. CONSTITUTION: A resin protection layer is coated on one side of a support film. The support film is dried. A photosensitive resin layer is coated on one side of the resin protection layer. The photosensitive resin layer is dried. A protection film is coated on the photosensitive resin layer.</p> |
申请公布号 |
KR20110077701(A) |
申请公布日期 |
2011.07.07 |
申请号 |
KR20090134347 |
申请日期 |
2009.12.30 |
申请人 |
KOLON INDUSTRIES, INC. |
发明人 |
MOON, HEE WAN;BONG, DONG HUN;SUK, SANG HOON |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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