发明名称 METHOD OF PREPARING DRY FILM PHOTORESIST
摘要 <p>PURPOSE: A method for manufacturing a dry film photoresist is provided to perform a light exposure process while a support film is eliminated to prevent bad influences due to the support film, thereby increasing resolution. CONSTITUTION: A resin protection layer is coated on one side of a support film. The support film is dried. A photosensitive resin layer is coated on one side of the resin protection layer. The photosensitive resin layer is dried. A protection film is coated on the photosensitive resin layer.</p>
申请公布号 KR20110077701(A) 申请公布日期 2011.07.07
申请号 KR20090134347 申请日期 2009.12.30
申请人 KOLON INDUSTRIES, INC. 发明人 MOON, HEE WAN;BONG, DONG HUN;SUK, SANG HOON
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址