| 摘要 |
PROBLEM TO BE SOLVED: To provide a peeling apparatus adapted to suck a separator through a suction means in forming a peeling start part with a needle and to displace the suction means in a peeling direction in a state of maintaining the suction to peel the separator from an adhesive layer. SOLUTION: The peeling apparatus 10 peeling the separator 11 from the adhesive layer 12 in a state of the adhesive sheet S being stuck to a substrate 13 includes a table 15 supporting the substrate 13: a needle 16 piercing the separator 11 from the upper face; a support means 18 displacing the needle 16 to form the peeling start part 11A; and a suction pad 35 sucking the separator 11. When forming the peeling start part 11A, the suction pad 35 applies suction force to the separator 11, and in the formed state of the peeling start part 11A, the suction pad 35 is rotated in a separating direction from the substrate to peel the separator 11. COPYRIGHT: (C)2011,JPO&INPIT |
