SURFACE TREATMENT METHOD OF A DEVICE USING NANO MASK
摘要
PURPOSE: A surface treatment method of a device using a nano mask is provided to control a shape of a device surface via a simple method. CONSTITUTION: A structure having a surface of the first polarity is prepared. Nano particles are coupled on a surface of the structure by supplying the nano particles with the surface of the second polarity for the structure. A curved structure(13) is formed on the surface of the structure by engraving the surface of the structure via a dry engraving process.
申请公布号
KR20110079223(A)
申请公布日期
2011.07.07
申请号
KR20090136218
申请日期
2009.12.31
申请人
SAMSUNG ELECTRONICS CO., LTD.;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY