发明名称 SURFACE TREATMENT METHOD OF A DEVICE USING NANO MASK
摘要 PURPOSE: A surface treatment method of a device using a nano mask is provided to control a shape of a device surface via a simple method. CONSTITUTION: A structure having a surface of the first polarity is prepared. Nano particles are coupled on a surface of the structure by supplying the nano particles with the surface of the second polarity for the structure. A curved structure(13) is formed on the surface of the structure by engraving the surface of the structure via a dry engraving process.
申请公布号 KR20110079223(A) 申请公布日期 2011.07.07
申请号 KR20090136218 申请日期 2009.12.31
申请人 SAMSUNG ELECTRONICS CO., LTD.;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 CHO, YONG HOON;KO, YOUNG HO
分类号 H01L21/027;H01L31/04 主分类号 H01L21/027
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