发明名称 METHOD OF FABRICATING P-TYPED POLYGATE AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
摘要 PURPOSE: A method for forming a P type poly gate and a method for manufacturing a semiconductor device using the same are provided to diffuse p type impurities to the lower side of a poly gate without a boron penetration phenomenon by diffusing the p type impurities through a thermal process after an impurity block area is formed on the middle area of a poly gate. CONSTITUTION: An impurity block area(112) is formed in a n type doped poly gate(110) and is set to correspond to 1/3(T1) to 1/2(T2) of the total thickness of a poly gate. The poly gate with the impurity block area is doped with a p type impurity. The p type impurity is accumulated in the impurity block area. The p type impurity accumulated in the impurity block area is diffused to the poly gate by a thermal process.
申请公布号 KR20110077963(A) 申请公布日期 2011.07.07
申请号 KR20090134666 申请日期 2009.12.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 ROUH, KYONG BONG
分类号 H01L21/336 主分类号 H01L21/336
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