摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser element capable of improving a manufacturing yield. SOLUTION: A resonator structure including a buffer layer 102, a lower semiconductor DBR 103 and an active layer 105, an upper semiconductor DBR 107, and a contact layer 109 are laminated on a substrate 101. On an injection surface where a laser beam is ejected, a p-side electrode 113 is provided by surrounding an injection area. In the injection area, a dielectric film is provided whose reflectivity of periphery is made to be lower than that of the center. Vicinity of the end of the dielectric film is tilted against the injection surface. COPYRIGHT: (C)2011,JPO&INPIT
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