发明名称 |
APPARATUS FOR TESTING ARRAY |
摘要 |
PURPOSE: An array testing apparatus is provided to efficiently and stably apply an electric signal to the substrate by including a plurality of support plates composed of a loading unit and/or unloading unit. CONSTITUTION: A substrate is loaded on a plurality of support plates(50) which are arranged with a preset space. A plate moving unit moves at least one support plate to control a space between a plurality of support plates. The plate moving unit includes a guide unit and a driving device. A guide unit(51) movably supports the support plate. The driving device is connected to the support plate and moves the support plate.
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申请公布号 |
KR20110079024(A) |
申请公布日期 |
2011.07.07 |
申请号 |
KR20090135974 |
申请日期 |
2009.12.31 |
申请人 |
TOP ENGINEERING CO., LTD. |
发明人 |
SEO, YONG KYU;KIM, SANG YOUNG |
分类号 |
H01L21/683;G02F1/13;H01L21/677 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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