发明名称 APPARATUS FOR TESTING ARRAY
摘要 PURPOSE: An array testing apparatus is provided to efficiently and stably apply an electric signal to the substrate by including a plurality of support plates composed of a loading unit and/or unloading unit. CONSTITUTION: A substrate is loaded on a plurality of support plates(50) which are arranged with a preset space. A plate moving unit moves at least one support plate to control a space between a plurality of support plates. The plate moving unit includes a guide unit and a driving device. A guide unit(51) movably supports the support plate. The driving device is connected to the support plate and moves the support plate.
申请公布号 KR20110079024(A) 申请公布日期 2011.07.07
申请号 KR20090135974 申请日期 2009.12.31
申请人 TOP ENGINEERING CO., LTD. 发明人 SEO, YONG KYU;KIM, SANG YOUNG
分类号 H01L21/683;G02F1/13;H01L21/677 主分类号 H01L21/683
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