| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system for containing components within the vacuum chamber of a lithographic apparatus. <P>SOLUTION: A container used in a lithographic apparatus is provided. The container is configured to have an internal space filled at least partly with filling material including a plurality of gas bubbles, which houses at least one component of the lithographic apparatus. <P>COPYRIGHT: (C)2011,JPO&INPIT |
