| 摘要 |
PROBLEM TO BE SOLVED: To reduce complication and errors caused by the setting of a recipe for each treatment module provided in a substrate treatment apparatus. SOLUTION: A method for setting a treatment recipe with respect to a final product or a treatment of a substrate and a substrate treatment setting support device equipped with a user interface that enables the implementation of the method are provided. By using the method and the device, a user can set a recipe for each treatment to a substrate displayed on a display device or can set a recipe, either for each treatment module related to treatment or collectively for all the treatment modules. The user can also use information about estimated results of treatment based on an inputted setting value for setting a recipe. Consequently, complication and errors caused by the setting of a recipe for each treatment module provided in a substrate treatment apparatus can be reduced. COPYRIGHT: (C)2011,JPO&INPIT
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