| 摘要 |
PROBLEM TO BE SOLVED: To provide an ejection inspection device capable of improving detection precision of an output signal in a nozzle inspection. SOLUTION: The ejection inspection device includes: a nozzle that ejects liquid; an inspection circuit that inspects ejection of liquid from the nozzle; and a controller that controls ejection of the nozzle, wherein the detection circuit comprises a first electrode that sets the liquid ejected from the nozzle to be a first potential, a second electrode that is disposed on a position opposite to the nozzle and is set to be a second potential different from the first potential and a filter circuit that outputs a signal based on a potential change of at least one side of the first electrode and the second electrode to intercept frequencies of a predetermined value or more on the output signal when droplets are ejected from the nozzle a plurality of times according to the ejection control by means of the controller. Further, the inspection circuit detects output signals of frequency component passing through the filter circuit and inspects the ejection of liquid from the nozzle, wherein the frequencies of the predetermined value or more intercepted by the filter circuit are higher than the ejection frequency when a plurality of droplets are ejected from the nozzle. COPYRIGHT: (C)2011,JPO&INPIT
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