| 摘要 |
PROBLEM TO BE SOLVED: To efficiently replace an inspection target object in an interferometer, and easily adjust a position between the inspection target object and an interferometer body even if a constitution is simple. SOLUTION: The interferometer 1 includes: a holding protrusion 5 for holding the spherical center R of an inspection target surface 10a on an axial line O; the interferometer body 14 for accommodating an interference optical system for dividing a coherent light flux from a light source into a measurement light flux for irradiating the inspection target surface 10a and a reference light flux reflected by a reference surface, and interfering the reflection light flux as the measurement light flux reflected on the inspection target surface 10a and the reference light flux; a pedestal 2 disposed at a position at which the interferometer body 14 faces the holding protrusion 5; an adjustment mechanism 20 for movably holding the interferometer body 14 in the direction orthogonal to at least the axial line O, and aligning an optical axis L of the interference optical system with the axial line O; and a movable holding table 6 for holding the holding protrusion 5, and movably provided in the direction of the axial line O. A position relationship between an inspection target lens 10 and the interferometer body 14 is adjusted by the adjustment mechanism 20 and the movable holding table 6. COPYRIGHT: (C)2011,JPO&INPIT |
