METHOD OF FABRICATING SILICA NANO-WIRES

摘要

PURPOSE: A method for manufacturing silica nano-wire is provided to grow silica nano-wire to the one dimensional linear direction based on substrate selective chemical reaction using a precursor with a heteroleptic structure and oxygen-containing gas. CONSTITUTION: A method for manufacturing silica nano-wire includes the following: A target is arranged in a reaction chamber. A precursor with a heteroleptic structure is supplied into the reaction chamber. The chemical formula of the heteroleptic structure is SiA_2B_2, and the A and the B are different functional groups. Oxygen-containing gas is supplied and is preferentially reacted with either of the A or the B. The intermediate from the reaction of the precursor and the oxygen-containing gas is grown on the surface of the target. The A is amine group, and the B is hydrogen group.