| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor and an electronic apparatus capable of being miniaturized or made thin. <P>SOLUTION: The angular velocity sensor 1 includes oscillating elements 10x, 10y, 10z' and a support substrate 20 for supporting these elements. The oscillating element 10x detects an angular velocity around an axis parallel with the X axis. The oscillating element 10y detects an angular velocity around an axis parallel with the Y axis. The oscillating element 10z' detects an angular velocity around an axis parallel with Z' axis direction which obliquely intersects with the X axis in the XZ plane and outputs a signal for detecting the angular velocity around an axis parallel with the Z axis. Since the oscillator element 10z' is obliquely mounted to the support substrate 20, the thickness dimension of the sensor can be reduced. <P>COPYRIGHT: (C)2011,JPO&INPIT |
