| 摘要 |
PROBLEM TO BE SOLVED: To accurately perform operation for positioning and holding a frame of a work unit below a holding surface of a holding table without operator's manual operation nor use of a dedicated mechanism therefor. SOLUTION: The frame 5 of the work unit 7 is sucked and held by a work unit holder 43 of a carry-in mechanism (carry mechanism) 40, an arm 42 of the carry-in mechanism 40 is swiveled to position the work unit 7 above a table 50, and the work unit holder 43 is lowered to place a wafer 1 on a holding surface 56 of a chuck table 55 and further lowered to press the frame 5 down, thereby positioning the frame below the holding surface 56. Furthermore, a table base 53 is rotated to engage and hold the frame 5 below press pieces 54b of a plurality of hooks 54 (frame engagement part) provided to the table base 53. COPYRIGHT: (C)2011,JPO&INPIT |
