| 摘要 |
PROBLEM TO BE SOLVED: To effectively remove a harmful substance (s) attached to a gas passage of each section of the device in a gas treatment operation for leading out a treated gas G' to a gas discharge passage 5 by allowing a treated gas G from a gas supply passage 4 to pass through an inlet-side heat storage chamber 10A, a combustion chamber 8, and an outlet-side heat storage chamber 10B. SOLUTION: A heater 7 for combustion, of the combustion chamber 8 is operated for heating in a state that delivery of the treated gas G from a treated gas generation source 2 to the gas supply passage 4 is stopped, and in this state, a cleaning gas G" is circulated to a device body section 1a through an air return passage 20 branched from the gas discharge passage 5 and connected to the gas supply passage 4, and a part of the circulated cleaning gas G" guided by the air return passage 20 is circulated to the gas supply passage 4 through a cross-over passage 21 crossing over a downstream-side part and an upstream-side part of the gas supply passage 4. COPYRIGHT: (C)2011,JPO&INPIT |
