METHOD OF FABRICATIING OXIDE SUPERCONDUCTING THIN FILM

摘要

The present invention is a method of fabricating an oxide superconducting thin film for use in fabrication of a superconducting wire by a coating-pyrolysis process using a fluorine-free metal organic compound as a raw material. An intermediate heat treatment of decomposing a carbonate contained in a thin film to be subjected to a sintering heat treatment for a crystallizing heat treatment is conducted before the sintering heat treatment. The intermediate heat treatment is conducted in an atmosphere having a carbon dioxide concentration lower than or equal to 10 ppm. The metal organic compound is a metal organic compound containing aβ-diketone complex.