摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fluoride that emits light at high luminance in a vacuum UV region, and to provide a new vacuum UV light emitting element comprising the fluoride, suitable to be used for photolithography, cleaning of substrates of semiconductors or liquid crystals, sterilization, next-generation high-capacity optical discs and medical treatment (ophthalmologic treatment, DNA cutting) and the like, and to provide a vacuum UV light emitting scintillator suitable to be used for a small-size radiation detector in which a diamond light receiving element or an AlGaN light receiving element having low background noises are assembled as a substitute of a conventional photomultiplier tube. <P>SOLUTION: A fluoride crystal expressed by chemical formula K<SB>3-X</SB>Na<SB>X</SB>Lu<SB>Y</SB>F<SB>3+3Y</SB>(where, X and Y satisfy 0.7<X<1.3 and 0.85<Y<1.1) is produced by pulling a source melt through a hole formed at a bottom of a crucible 5. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |