X-RAY MONOCHROMATOR, METHOD FOR MANUFACTURING THE SAME, AND X-RAY SPECTRAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an X-ray monochromator having satisfactory X-ray spectroscopic performances. SOLUTION: The X-ray monochromator includes: a substrate 18 having a concave surface; and an inorganic oxide film formed on the concave surface and having a plurality of pores that are periodically layered in the normal directions of the concave surface. COPYRIGHT: (C)2011,JPO&INPIT