| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for drying a substrate capable of preventing liquid drops from remaining on the substrate to suppress the generation of a water mark more effectively than Marangoni drying. SOLUTION: The apparatus for drying a substrate cleaned with a diamagnetic liquid includes: a magnet 4 for moving liquid adhered to the substrate by a magnetic force; and a magnet transferring means 5 for moving the magnet 4 toward the edge side of the substrate along the substrate. Moreover, when drying the substrate cleaned with the diamagnetic liquid, the magnet 4 is moved closer to the substrate and the magnet 4 is moved toward the edge side of the substrate along the substrate. COPYRIGHT: (C)2011,JPO&INPIT
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