| 摘要 |
PROBLEM TO BE SOLVED: To provide a drive device improved in driving accuracy in the vertical direction, along with a measuring device. SOLUTION: A Z-axis spindle 19 is guided for movement in the vertical direction by means of air bearings 22-1 and 22-2. A shaft motor 23 is composed of a shaft 25 disposed to extend in the vertical direction and a slider 26 that produces a driving force to drive the Z-axis spindle 19 in a direction along the shaft 25 in contactless manner with the shaft 25. An air cylinder 29 supports the weight of the Z-axis spindle 19 by the shaft 25 of the shaft motor 23 and produces a pushing force comparable to the weight of the Z-axis spindle 19 in response to the movement of the Z-axis spindle 19. This invention can be applied to, for example, a three-dimensional measuring apparatus for measuring a shape using a probe. COPYRIGHT: (C)2011,JPO&INPIT
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