摘要 |
The invention relates to a positioning system (10) for positioning an object relative to a technical facility, in particular an observation, measurement or processing system or the like, comprising an object carrier device for receiving the object to be positioned, and a positioning device (12) for positioning the object carrier device, wherein the positioning device has a drive facility for driving the object carrier device, wherein the drive facility has two linear motors (21; 22), arranged such that positioning of the object carrier device in two axes is possible, wherein the positioning device has a measurement facility (23), and wherein the drive facility and the measurement facility are arranged in a manner interposed between a referencing base (26) of the positioning device and the object carrier device.
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