SEALING UNIT AND APPARATUS FOR PROCESSING A SUBSTRATE HAVING THE SEALING UNIT

摘要

PURPOSE: A sealing unit and a substrate processing apparatus including thereof are provided to uniformly maintain the shape of the sealing unit using the pressure of fluid inside a pressure vessel. CONSTITUTION: A sealing unit comprises the following: a sealing member(110) including the hollow internal space, located around the contact surface circumference of upper and lower containers; a pressure controller(120) for controlling the pressure of the sealing member by supplying or discharging fluid from the internal space; and a resin unit included in the sealing member.