| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and simple temperature control device capable of directly controlling the temperature of an object in a vacuum chamber, and high in thermal efficiency, and to provide a vacuum processing device including the same. SOLUTION: This temperature control device for controlling the temperature of a heat transfer stage 12 installed in a vacuum chamber 11 for arranging an object thereon is structured to include: a refrigerator 13 including a piston mechanism portion 13A and a refrigerator cooling portion 13B and structured to arrange the refrigerator cooling portion in the vacuum chamber to bring the refrigerator cooling portion into direct contact with the heat transfer stage; and a control portion 17 for controlling cooling operation action of the refrigerator. This vacuum processing device 10 is structured to include the temperature control device. COPYRIGHT: (C)2011,JPO&INPIT
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