发明名称 PHASE CHANGE MEMORY DEVICE CAPABLE OF INCREASING SENSING MARGIN AND METHOD FOR MANUFACTURING THE SAME
摘要 A phase change memory device capable of increasing a sensing margin and a method for manufacturing the same. The phase change memory device includes a semiconductor substrate formed with a device isolation structure which defines active regions; first conductivity type impurity regions formed in surfaces of the active regions and having the shape of a line; a second conductivity type well formed in the semiconductor substrate at a position lower than the device isolation structure; a second conductivity type ion-implantation layer formed in the semiconductor substrate at a boundary between a lower end of the device isolation structure and the semiconductor substrate; a plurality of vertical PN diodes formed on the first conductivity type impurity regions; and phase change memory cells formed on the vertical PN diodes.
申请公布号 US2011165752(A1) 申请公布日期 2011.07.07
申请号 US201113047154 申请日期 2011.03.14
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHANG HEON YONG
分类号 H01L21/62 主分类号 H01L21/62
代理机构 代理人
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