HIGH QUALITY PASSIVE ELEMENT MODULE HAVING AIR CAVITY AND METHOD OF MANUFACTURING THE SAME

摘要

A high quality passive element module having an air cavity and a method of manufacturing the same that can improve performance by reducing loss by a substrate when operating at a high frequency, minimize crosstalk between signal lines, and have mechanical stability are provided. The high quality passive element module having an air cavity includes: a metal substrate; a passive element that is formed in a designed circuit pattern in an upper surface of the metal substrate; and a support pillar that is formed with a metal oxide layer in which a portion of the metal substrate is anodized between the metal substrate and the passive element and that is formed by partially removing the metal oxide layer to correspond to a designed circuit pattern. The method of manufacturing a high quality passive element module having an air cavity includes: preparing a metal substrate; anodizing the metal substrate; forming a passive element in a designed circuit pattern in an upper surface of an anodized metal oxide layer; and forming an air cavity and a support pillar by removing a metal oxide layer of a portion in which the passive element is not formed.