CARBON NANOTUBES-BASED MOVABLE ELECTRICAL CONTACT STRUCTURE AND MICRO POSITION SENSOR USING THE SAME, AND MANUFACTURING METHODS THEREOF

摘要

PURPOSE: A movable electrical connecting structure using carbon nano tube, a micro position sensor using the structure and a manufacturing method of the structure and the sensor are intended to provide a sliding type of a micro movable electrical connecting structure, which does not need additional works including gap control due to self alignment of the contact interface of a connecting unit. CONSTITUTION: A movable electrical connecting structure using carbon nano tube comprises electrodes(10) and carbon nano tube layers(20). The carbon nano tube layers are respectively formed on a pair of electrodes making relative movement, and on the contact surface between the electrodes. The carbon nano tube layers are deposited perpendicularly to the contact surface.