COOLING CATHODE

摘要

PURPOSE: A cathode for cooling an anode shield is provided to prevent a thin film corresponding to an upper anode shield from being corrugated or torn. CONSTITUTION: A cathode(100) for cooling an anode shield comprises a base plate(110), an insulation material(120), a body(130), a magnet plate(140), a magnet(150), a target(S), and an anode shield(160). The base plate is formed in the bottom of the cathode. The insulation material is loaded on the top of the base plate and cuts off electricity conducted to the base plate. The body is electrically connected to an anode and has a groove(135). The magnet plate is accepted in the groove and supports the magnet. The magnet is attached on the top of the magnet plate. The target is formed in the top end of the body and generates deposition materials. The anode shield is attached on the top of the base plate and is composed of side and upper anode shields(163,166).