| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method capable of producing a piezoelectric ceramic without generating cracks during a hot hydrostatic press treatment. <P>SOLUTION: The following steps (1)-(5) sequentially are performed. Those are: step (1) for pre-sintering a molded body of the piezoelectric ceramic material to obtain a presintered body; the step (2) for burying the presintered body into oxide powder, then inserting it into a hot hydrostatic press in an inert gas; the temperature raising and a pressure raising step (3) for increasing the temperature in the hot hydrostatic press to a predetermined treatment temperature at the rate of 100-150°C per hour, and increasing the pressure in the hot hydrostatic press to less than or equal to 30 MPa; the pressure raising step (4) for increasing the pressure in the hot hydrostatic press to the predetermined pressure for 2-3 hours; and the keeping step (5) for keeping the predetermined temperature and pressure in the hot hydrostatic press for 0.5-2 hours. <P>COPYRIGHT: (C)2011,JPO&INPIT |
