发明名称 X-RAY TOPOGRAPHY APPARATUS
摘要 An x-ray topography apparatus in which x-rays diffracted from a sample which is scanned with a linear x-ray are detected by an x-ray detector to obtain a planar diffraction image. In this x-ray topography apparatus, the x-ray detector is an imaging plate shaped as a cylinder and provided with a surface area that is larger than the sample, and the imaging plate is made to undergo α-rotation about the center axis of the cylindrical shape in coordination with scanning movement of the linear x-rays. The center axis of the cylindrical shape extends in a direction at a right angle with respect to the direction of the scanning movement of the linear x-rays.
申请公布号 US2011164729(A1) 申请公布日期 2011.07.07
申请号 US20110983359 申请日期 2011.01.03
申请人 RIGAKU CORPORATION 发明人 KIKUCHI TETSUO
分类号 G01N23/207 主分类号 G01N23/207
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