| 摘要 |
A substrate processing apparatus which can securely show the status of recipe transition is provided. In a substrate processing apparatus including a main control unit which sends a control instruction to process a substrate, and a sub control unit which carries out control of the apparatus in accordance with the control instruction from main control unit, the main control unit has a memory unit which stores plural recipes, a display control unit which accepts an execution instruction to cause an arbitrary recipe of the plural recipes to be executed, and a display unit which displays the arbitrary recipe designated by the display control unit, on an operation screen. When an execution instruction to cause another recipe stored in the recipe storage means to be executed is received during the execution of the arbitrary recipe, the arbitrary recipe and this another recipe are displayed on the operation screen together with a factor which has generated the execution instruction to cause this another recipe to be executed.
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