MAGNETRON DEVICE AND METHOD FOR THE UNIFORM EROSION OF A TARGET USING SUCH A DEVICE

摘要

The invention relates to a device comprising a specific arrangement of magnets (4) that generate a magnetic field enabling a practically uniform erosion of a cathode or target (2), in such a way that the material thereof is almost fully used. The magnetron device comprises the target (2) fixed to a metallic plate (3) behind which magnets (4) are fixed to a magnetic plate (5). The magnets (4) are arranged according to a periodical two-dimensional network on a magnetic plate (5) that can be moved parallel to the target (2) along one of the axes of the network, between a first position and a second position separated by half of the parameter of the network, in such a way that areas of high plasma concentration generated in the first position correspond to areas of low plasma concentration in the second position and vice versa.