发明名称 AMPULE TO REDUCE STRESS BETWEEN THE AMPULE AND SINGLE CRYSTAL AND SINGLE CRYSTAL GROWING APPARATUS HAVING THE SAME
摘要 PURPOSE: A single crystal growing ampulse and a single crystal growing apparatus including the same are provided to improve the quality of grown single crystal ingot by minimizing stress between the inner side of an ampule body and a single crystal sample. CONSTITUTION: An ampule body(2) has a non-parallel shape with regard to a single crystal growing direction. The diameter of the lateral sides(4) of the ampule body gradually increases from the lower side(3) in the single crystal growing direction.
申请公布号 KR20110077261(A) 申请公布日期 2011.07.07
申请号 KR20090133774 申请日期 2009.12.30
申请人 KOREA ATOMIC ENERGY RESEARCH INSTITUTE 发明人 PARK, SE HWAN;LEE, JAE HYUNG;HA, JANG HO;CHO, YUN HO;KIM, HAN SU
分类号 C30B11/00;C30B29/06;H01L21/02 主分类号 C30B11/00
代理机构 代理人
主权项
地址