OXIDE EVAPORATION MATERIAL, TRANSPARENT CONDUCTING FILM, AND SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To provide an oxide evaporation material in which a high-refractive-index transparent film of low resistance and high optical transmittance in the visible to near-infrared region can be consistently manufactured even when the amount of oxygen to be introduced during the film deposition is small, a high-refractive-index transparent film to be manufactured by using the oxide evaporation material, and a solar cell in which the conductive transparent film is used for an electrode.

SOLUTION: The oxide evaporation material includes a sintered body containing indium oxide as a main component thereof and cerium with a Ce/In atomic ratio of 0.001 to 0.110. The L* value in the CIE1976 color space is 62 to 95. The oxide evaporation material with the L* value of 62 to 95 has an optimal oxygen amount. Accordingly, even when a small amount of oxygen gas is introduced into a film deposition vacuum chamber, a transparent conductive film having low resistance and high transmittance in the visible to near-infrared region is formed by vacuum deposition methods. Since the amount of the oxygen gas introduced is small, the difference in composition between the film and the evaporation material is made small. This reduces the variations in composition and characteristics among films formed in large quantities.

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