发明名称 LIGHT SOURCE UNIT, EXPOSURE LIGHT IRRADIATING DEVICE, EXPOSURE DEVICE, METHOD OF MANUFACTURING DISPLAY PANEL SUBSTRATE, DEVICE AND METHOD OF INSPECTING SEMICONDUCTOR LIGHT EMITTING ELEMENT SECTION
摘要 <P>PROBLEM TO BE SOLVED: To provide a light source unit or an irradiating-light irradiation device which can obtain easy and safe alignment between semiconductor light emitting elements and lenses even if a plurality of, or specifically hundreds to thousands or more of semiconductor light emitting elements are used to form exposure light, an exposure device which can obtain efficient or accurate light exposure using the unit or device, or a device or method of efficiently or safely inspecting an emitting light source having many semiconductor light emitting elements. <P>SOLUTION: In the light source unit having a plurality of semiconductor light emitting elements and lenses for receiving light emitted from the semiconductor light emitting elements and outputting light, the exposure light irradiating device or the exposure device, the semiconductor light emitting elements are provided to be associated with the lenses, the lens unit has a means for fixing the lenses in such a manner that adjacent ones of the lenses are contacted. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011134932(A) 申请公布日期 2011.07.07
申请号 JP20090293952 申请日期 2009.12.25
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 TEZUKA HIDEKAZU;DOI HIDEAKI;NEMOTO RYOJI;YOSHITAKE YASUHIRO;ISHIDA SUSUMU
分类号 H01L21/027;H01L33/58 主分类号 H01L21/027
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