| 摘要 |
PROBLEM TO BE SOLVED: To provide an image pattern collation device and method, allowing accurate acquisition of a relative displacement amount between a first image pattern and a second image pattern with resolution less than a pixel pitch. SOLUTION: A first displacement amount arithmetic part obtains correspondence relation between the first image pattern and the second image pattern in a unit of the pixel pitch, and obtains the relative displacement amount (a<SB>x</SB>, a<SB>y</SB>) of a corresponding position in the second image pattern to a specific position of the first image pattern. A Fourier transform part, an inclination phase addition part, and an inverse Fourier transform part obtain image data p<SB>2</SB>having moved in parallel to original image data p<SB>1</SB>by a relative displacement amount (s<SB>x</SB>, s<SB>y</SB>) less than the pixel pitch. A similarity arithmetic part compares image data q whose center is the corresponding position out of second image data representing the second image pattern and the image data p<SB>2</SB>, and obtains similarity between the two. COPYRIGHT: (C)2011,JPO&INPIT |
