摘要 |
PROBLEM TO BE SOLVED: To provide an ozone concentrator which can effectively prevent the inflow of impurities such as solid nitrogen oxides to an ozone separation part concentrating ozone. SOLUTION: In a reserve cooling part 44, since temperature is controlled to the one higher than the solidification point of ozone and also lower than the solidification point of nitrogen oxides included in an ozone-containing gas, the nitrogen oxides are captured by the reserve cooling part 44. Further, in the case the nitrogen oxides can not be captured at the reserve cooling part 44 or in the case the temporarily captured ones are peeled and scattered, and are leaked out from the reserve cooling part 44 as the ice pieces (fine particles) of the nitrogen oxides, they are captured at a filter part 45 to be removed, thus the intrusion of the nitrogen oxides to the ozone separation part 43 can be effectively prevented. COPYRIGHT: (C)2011,JPO&INPIT |