发明名称 METHOD TO DYNAMICALLY TUNE PRECISION RESISTANCE
摘要 A precision resistor is formed with a controllable resistance to compensate for variations that occur with temperature. An embodiment includes forming a resistive semiconductive element having a width and a length on a substrate, patterning an electrically conductive line across the width of the resistive semiconductive element, but electrically isolated therefrom, and forming a depletion channel in the resistive semiconductive element under the electrically conductive line to control the resistance value of the resistive semiconductive element. The design enables dynamic adjustment of the resistance, thereby improving the reliability of the resistor or allowing for resistance modification during final packaging.
申请公布号 US2011163417(A1) 申请公布日期 2011.07.07
申请号 US20100683759 申请日期 2010.01.07
申请人 GLOBALFOUNDRIES INC. 发明人 SOSS STEVEN R.;KNORR ANDREAS
分类号 H01L29/8605;H01L21/02 主分类号 H01L29/8605
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