发明名称 |
ELECTROLESS PLATING A NICKLE LAYER AND A GOLD LAYER IN A SEMICONDUCTOR DEVICE |
摘要 |
A method and resulting device for maintaining non-porous nickel layer at a nickel/passivation interface of a semiconductor device in a nickel/gold electroless plating process. The method can include determining a thickness of a gold layer of the semiconductor device; determining an electroless plating rate and plating time of the gold layer to reach the determined thickness; determining a thickness of nickel under the gold layer to maintain the non-porous nickel layer at the nickel/passivation interface at a termination of an electroless gold plating process; and following the determinations, sequentially electroless plating of each of the nickel layer and gold layer on the device layer to the determined thicknesses.
|
申请公布号 |
US2011163454(A1) |
申请公布日期 |
2011.07.07 |
申请号 |
US20100943341 |
申请日期 |
2010.11.10 |
申请人 |
HERBSOMMER JUAN ALEJANDRO;LOPEZ OSVALDO |
发明人 |
HERBSOMMER JUAN ALEJANDRO;LOPEZ OSVALDO |
分类号 |
H01L23/532;H01L21/3205 |
主分类号 |
H01L23/532 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|