发明名称 ELECTROLESS PLATING A NICKLE LAYER AND A GOLD LAYER IN A SEMICONDUCTOR DEVICE
摘要 A method and resulting device for maintaining non-porous nickel layer at a nickel/passivation interface of a semiconductor device in a nickel/gold electroless plating process. The method can include determining a thickness of a gold layer of the semiconductor device; determining an electroless plating rate and plating time of the gold layer to reach the determined thickness; determining a thickness of nickel under the gold layer to maintain the non-porous nickel layer at the nickel/passivation interface at a termination of an electroless gold plating process; and following the determinations, sequentially electroless plating of each of the nickel layer and gold layer on the device layer to the determined thicknesses.
申请公布号 US2011163454(A1) 申请公布日期 2011.07.07
申请号 US20100943341 申请日期 2010.11.10
申请人 HERBSOMMER JUAN ALEJANDRO;LOPEZ OSVALDO 发明人 HERBSOMMER JUAN ALEJANDRO;LOPEZ OSVALDO
分类号 H01L23/532;H01L21/3205 主分类号 H01L23/532
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