IMPROVED ILLUMINATION SYSTEMS AND METHODS FOR PHOTOLUMINESCENCE IMAGING OF PHOTOVOLTAIC CELLS AND WAFERS
摘要
Methods are presented for analysing semiconductor materials (8), and silicon photovoltaic cells and cell precursors in particular, using imaging of photoluminescence (12) generated with high intensity illumination (16). The high photoluminescence signal levels (16) obtained with such illumination (30) enable the acquisition of images from moving samples with minimal blurring. Certain material defects of interest to semiconductor device manufacturers, especially cracks, appear sharper under high intensity illumination. In certain embodiments images of photoluminescence generated with high and low intensity illumination are compared to highlight selected material properties or defects.
申请公布号
WO2011079353(A1)
申请公布日期
2011.07.07
申请号
WO2011AU00004
申请日期
2011.01.04
申请人
BT IMAGING PTY LTD;BARDOS, ROBERT ANDREW;WEBER, JUERGEN;TRUPKE, THORSTEN;MAXWELL, IAN ANDREW;MCMILLAN, WAYNE
发明人
BARDOS, ROBERT ANDREW;WEBER, JUERGEN;TRUPKE, THORSTEN;MAXWELL, IAN ANDREW;MCMILLAN, WAYNE