发明名称 APPARATUS FOR FORMING SELECTIVE EMITTER OF SOLAR CELL USING LASER
摘要 <p>PURPOSE: An apparatus for manufacturing a selective of a solar cell using laser is provided to form selective emitters having various shapes by coping with changes of processing conditions via a galvanometer scanner. CONSTITUTION: A laser part(110) outputs the laser beam. A laser beam transmitting unit(120) transmits the laser beam outputted from the laser part. A collimating lens(130) collimates the laser beam transmitted through the laser beam transmitting unit. A plurality of collimating lenses have different focal distances. A galvanometer scanner(140) polarizes the collimated incident laser beam to a wanted position on a solar cell.</p>
申请公布号 KR101046953(B1) 申请公布日期 2011.07.06
申请号 KR20110006064 申请日期 2011.01.20
申请人 LTS CO., LTD. 发明人 PARK, HONG JIN;SUH, JONG HYUN;SUN, SANG PIL
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
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