METHOD OF FABRICATING SURFACE PLASMON COLOR FILTER USING NANO PATTERNING

摘要

PURPOSE: A method for manufacturing a surface Plasmon color filter using nano patterning is provided to control the color of the color filter and the size of holes using a surface Plasmon phenomenon. CONSTITUTION: A polymer film with the electrification characteristic is formed on the surface of a stamp with a convexed part. The stamp is in contact with the surface of a substrate(210). A voltage is applied to a space between the metal layer of the stamp and the substrate. The stamp is separated from the substrate. A remained polymer film charged with negative charges and positive charges is transferred on the substrate. Nano-spheres charged with charges opposite to the substrate are applied on the surface of the substrate. The nano-spheres are etched to form a nano-sphere pattern(245'). A conductive film(220) is deposited on the entire surface of the substrate. The nano-sphere pattern and the conductive film on the upper side of the nano-sphere pattern are eliminated. The remained polymer film pattern is eliminated to form a penetrated film pattern with a plurality of holes.