发明名称 Method and apparatus for manufacturing semiconductor device
摘要 <p>A manufacturing line has a feeder (11) for feeding a hoop substrate (2), a bake oven (32) for heating and drying the fed hoop substrate (2), a die bonding device (34) for applying an adhesive to a predetermined position on the dried substrate (2) to mount an IC chip, and a cure oven (36) for bonding the IC chip to the hoop substrate (2) by heating and curing the adhesive.</p>
申请公布号 EP1376658(B1) 申请公布日期 2011.07.06
申请号 EP20020020903 申请日期 2002.09.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TAKEMURA, HISAO
分类号 H01L21/00 主分类号 H01L21/00
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