METAL THIN FILM TYPE STRAIN GAUGE FOR PRESSURE SENSOR AND PRESSURE SENSOR HAVING THE STRAIN GAUGE

摘要

PURPOSE: A metal thin film-type strain gauge for a pressure sensor and a pressure sensor including the same are provided to implement excellent high-temperature strength and electric properties. CONSTITUTION: A diaphragm(6) is made of stainless material and comprises a pressure introduction part(7). An insulating layer(5) is formed on the diaphragm. A strain gage(3) is formed on the insulating layer. The strain gages are metal thin-film type strain gages. A thin film strain gages are applied to the pressure sensor using a conventional manufacturing method The strain gages manufacture a pattern of 0.3~1 micrometer thickness using PVD.