发明名称 METHOD FOR FABRICATING PATTERN TO PREVENT CROSSTALK IN A IMAGE SENSOR
摘要 PURPOSE: A method for forming a pattern to prevent crosstalk in an image sensor is provided to prevent a light not condensed by a micro lens from being scattered at the boundary of a color filter, by forming an additional metal wiring with a cross pattern on the top of a first and a second metal wiring formed between a photo diode and the color filter. CONSTITUTION: A first and a second metal wiring(100,102) are formed in an inter-layer insulation film on a semiconductor substrate. A photo diode is formed on the semiconductor substrate. A third metal wiring(208) with a cross pattern is formed on the semiconductor substrate. The third metal wiring crosses across the center of the first and the second metal wiring. A color filter(104,106,108) is formed on the center of the cross pattern of the third metal wiring. A micro lens is formed to correspond to the color filter. The micro lens is formed on the semiconductor substrate of the color filter.
申请公布号 KR20110076044(A) 申请公布日期 2011.07.06
申请号 KR20090132641 申请日期 2009.12.29
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, KI HYOUNG
分类号 H01L27/146 主分类号 H01L27/146
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