Lithographic apparatus, optical element for a lithographic apparatus and device manufacturing method,申请号EP20050076746-传众专利搜索

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发明名称	Lithographic apparatus, optical element for a lithographic apparatus and device manufacturing method
摘要
申请公布号	EP1624342(B1)	申请公布日期	2011.07.06
申请号	EP20050076746	申请日期	2005.07.28
申请人	ASML NETHERLANDS B.V.	发明人	BOX, WILHELMUS JOSEPHUS
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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