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发明名称
Fabrication of semiconductor devices
摘要
申请公布号
US3066050(A)
申请公布日期
1962.11.27
申请号
US19600017180
申请日期
1960.03.23
申请人
PHILCO CORPORATION
发明人
JR. ALBERT F. GARTON,
分类号
C23C22/60;C25F3/14;H01L21/00
主分类号
C23C22/60
代理机构
代理人
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