| 摘要 |
PURPOSE: A melting device using microwaves is provided to enhance energy efficiency by transferring heat from a double structure of a heat radiating unitto between crucibles using the heat radiating unit and heating the heat radiating unit through microwaves. CONSTITUTION: Magnetron radiates microwaves through a waveguide connected to a chamber, of which the top is open. A first heat radiating unit(21) radiates heat with the microwaves of the magnetron in the chamber. A second heat radiating unit(22) is held in the first heat radiating unit and is heated by the microwaves and transferred heat. A crucible holds melted targets and is heated by heat transferred from the second heat radiating unit. An insulator(24) blocks heat radiated from the first and second heat radiating units in the chamber. |
