METHOD FOR STORING CHLOROSILANE

摘要

PURPOSE: A storage method of chlorosilane is provided to effectively prevent the contact between the chlorosilane with the atmosphere, and to prevent the generation of by-products. CONSTITUTION: A storage method of chlorosilane comprises the following a step injecting helium gas, or mixed gas containing hydrogen and inert gas selected from the helium gas, argon, or nitrogen as sealing gas into a storage container for storing the chlorosilane. The mixed gas contains less than 90mol% of hydrogen.