HYDROGEN SENSOR USING OPTICAL WAVEGUIDE

摘要

PURPOSE: A hydrogen detection sensor using multiple reflection optical waveguide is provided to facilitate manufacturing and improve perception sensitivity. CONSTITUTION: A hydrogen detection sensor using multiple reflection optical waveguide comprises a clad substrate, an optical waveguide, and a core. The optical waveguide is extended to be zig-zag buried in a clad substrate from one end receiving light. The core has an exposed part(31) to be mutually apart from in the side of the clad substrate. The reactive layer is made of a hydrogen reaction material including palladium reacting to hydrogen. A reactive layer is formed in the exposed parts of the core.