REWORK DEVICE FOR SEMICONDUCTOR WAFER

摘要

PURPOSE: An apparatus for regenerating a semiconductor wafer is provided to insert a wafer one by one by separating wafers to be regenerated from each other. CONSTITUTION: A semiconductor wafer reproduction device comprises a loading unit(30) for loading a wafer to be reproduced, a processing unit for regenerating a transferred wafer, and an unloading unit for unloading the wafer. The loading unit loads the wafer to be reproduced into the processing unit. The loading unit includes a sensor for detecting a size of the wafer. The processing unit transfers the loaded wafer. The processing unit includes a conveyor(40) which can partially change the damaged part. The processing unit includes an injection nozzle part.